Modeling reactive sputter deposition of titanium nitride in a triode magnetron sputtering system
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Surface and Coatings Technology
سال: 2011
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2011.07.013